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Time?temperature ) is used as the input to a process simulator, and a cross-sectional device structure is produced. • The device structure is used as the input to a device simulator, and the electrical characteristics of the device are produced. 5 Device Simulator • ATLAS?PISCES?MEDICI?DESSIS • Device simulation can be performed without process simulation, but the doping profile of the device will become a key question. • Device simulation is more mature than process simulation because the physics of the device operation are better understood. 6 Silvaco TCAD • ATHENA?

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